Carbon tetrachloride (CCl4) is mainly used as a Carbon source for the p-type doping of various III-V alloys.
- Deposition
- Doping
- Other Dopants
- US
- Korea
- China
- Taiwan
- Japan
- Europe
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)
Carbon tetrachloride (CCl4) is mainly used as a Carbon source for the p-type doping of various III-V alloys.
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