CHEMGUARD® GENIII CG010 Series Automated Chemical Refill System was esigned for maximum uptime and to meet the demanding needs of today’s manufacturing fabs. The CHEMGUARD® 10 Series are single tank, ultra high purity (UHP) cabinets (STLR’s) designed to help reduce your capital costs while maximizing uptime. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-effective manner.
The CG010 series is most at home in R&D or Non-Direct Liquid Inject (DLI) high volume manufacturing applications.
CHEMGUARD® has a reduced footprint of 457mm (18 in.) by 533 mm (21 in.), allowing for multiple cabinet placement adjacent to each other. This maximizes the use of your available floor space within the fab while reducing exhaust requirements for a lower cost of ownership. Each cabinet is fully automated and includes a microprocessor-based controller with color touch screen. The controller optimizes container change operations with automated monitoring to ensure removal of all chemical traces from pigtail connections. Standardized, modular design allows for customization, ease of maintenance and future expansion. Each CHEMGUARD® model is backed with testing and years of experience to ensure reliable chemical delivery to the tool.
The CHEMGUARD® family of high purity chemical delivery equipment is more than just a standalone piece of equipment in your fab. It is designed to interface directly to most OEM process tools and can be supplemented with fabwide distribution systems designed for ultra high purity liquids.