GASGUARD® Active Control Phase 1

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Our GASGUARD® Active Phase I technology now allows semiconductor fabs to achieve much greater precision in controlling the pressure of high vapor pressure gases.

Category:
  • Gases Delivery Systems
Locations:
  • US
  • Europe
Industry:
  • Logic
  • Memory (DRAM, NAND, 3D NAND)
  • Sensors (MEMS, Optoelectronics)
  • Advanced Packaging
  • Equipment
  • Display
  • Industrial
  • Electronic
  • Spray Foam Insulation
  • Conductive Adhesives
Brands:
  • GASGUARD®

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Product info

Description

Our GASGUARD® Active Phase I technology now allows semiconductor fabs to achieve much greater precision in controlling the pressure of high vapor pressure gases such as dopant gases, purge gases and high-pressure halocarbons (NF3, silane, N2O, CO2, CF4, etc.) during delivery to the tool, with zero drift. Maintain, repeat and stabilize pressure for high vapor pressure gases under varying manufacturing conditions with zero drift.

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