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Enhancing Semiconductor Development through Data Sharing
Join us for an engaging webinar exploring the transformative benefits of data sharing in the semiconductor industry, including zero quality issues, materials optimization, and scaling up new technology nodes.
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Semiconductor Evolution by Spin on Dielectric
Join us to discover how Spin-on Dielectrics (SOD) materials and processes contributed to advanced semiconductor device manufacturing, and new material development to overcome future device challenges.
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Advancing the Dry Etching Process
Join us to discover how to advance your dry etching process by building a robust supply chain and driving material innovation. This webinar is co-hosted by SEMI.
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Overcoming EUV Lithography Barriers Through DSA Technology
The complex molecular assembly of DSA will be explained, and we will walk through the steps of how it can be integrated into an advanced patterning process. This webinar is co-hosted by SEMI.
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Scaling Digital Solutions
Join us to discover how data and strengthening digital technologies is one of the top priorities for semiconductor businesses to address higher yields, zero defects, and shrinking dimensions.
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Advanced Materials
Learn how to best introduce new materials in chip fabrication workflows as the demand for better performance, functionality, and reliability grows for applications such as 5G, AI/VR, AR & edge computing.
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New Standards for Semiconductor Materials
Join us to discover how digital solutions are forming new ways of operating in a fast-paced, highly demanding semiconductor industry. This webinar series is co-hosted by SEMI.
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Innovations in ALD and ALE
Join us to discover how innovations in selective surface-controlled processes, including Atomic Layer Deposition (ALD) and Atomic Layer Etch (ALE), enable the manufacture of advanced electronic devices.
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Metrology and Inspection for Angstrom-Level Manufacturing
Presentation by Dario Alliata, PhD, Head of M&I Applications & Product Management
Watch On-demand
The Role & the Challenge of Metrology and Inspection in Advanced Packaging of AI Chips
Agenda
September 17, 2025 | 10:00 am - 11:00 am PDT
Are We There Yet? Metrology and Inspection for Angstrom-Level Manufacturing
The Role & the Challenge of Metrology and Inspection in Advanced Packaging of AI Chips by Dario Alliata | Head of M&I Applications & Product Management of The Electronics business of Merck KGaA, Darmstadt, Germany
Sub-Micron Pitch Scaling of Hybrid Bond Interconnects: Metrology Challenges by Eric Beyne, PhD | VP R&D / Program Director 3D System Integration Program / Senior Fellow of imec
Moderator: Michael Weigand | Senior Application ManagerBrewer Science
Speaker
Dario Alliata | Head of M&I Applications & Product Management
Dr. Dario Alliata joined Unity-SC, now part of the Electronics business of Merck KGaA, Darmstadt, Germany in the U.S. and Canada. In 2016 as product manager and is now Sr. Director of Applications with focus on Advanced packaging and Specialty substrates & devices. He worked in the semiconductor industry for more than 25 years, initially in R&D centers and later in equipment makers. He spent his entire career developing process control solutions for securing the manufacturing chain in the semiconductor industry.
He received a MD in Physics from the University of Milan (Italy) and hold a Ph.D. in Physics & Chemistry from the University of Berne (Switzerland).
Semiconductor Materials
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