The 23rd International Conference on Atomic Layer (ALD/ALE) 2023

Join us to discuss the latest technology of atomic layer-controlled deposition of thin films and now topics related to atomic layer etching.

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Other

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Sponsor

23 Jul 2023 - 26 Jul 2023

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Hyatt Regency Bellevue in Bellevue, Washington

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AVS ALD EU 2022 EMD Electronics AVS ALD EU 2022 EMD Electronics

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Intro

Organized by the Association for Science and Technology of Materials, Interfaces & Processing (AVS), the conference is dedicated to the science and technology of atomic layer controlled deposition of thin films and now topics related to atomic layer etching. Since 2001, the ALD conference has been held alternately in the United States, Europe, and Asia, allowing fruitful exchange of ideas, know-how, and practices between scientists.

Advance Your Knowledge With Our Leading Engineers

  1. Thong Ngo

    Sr. Process Engineer

    "NS-MoA-15 300 mm Wafer-Scale and Self-limiting Layer Synthesis of 2D MoSe2 by Atomic Layer Deposition"

    23 Jul 2023 - FROM 9:45 TO 10:30 UTC-07:00

  3. Randall Higuchi

    Process Engineer

    "AF-MoP-38 Evaluation of a Zr Precursor and Hf Precursor with Higher Thermal Stability for the Atomic Layer Deposition of zro2 and hfo2 Films"

    23 Jul 2023 - FROM 10:30 TO 11:00 UTC-07:00

  5. Ravi Kanjolia

    Technology Fellow

    Co-Authors: Mansour Moinpour and Jacob "AM-MoP-3 Reverse Templating Effects of Low-Resistivity Ru Ald on Sputtered Ru"

    23 Jul 2023 - FROM 10:45 TO 11:15 UTC-07:00

  7. Haripin Chandra

    Sr. R&D Manager

    Co-Authors: Changwon Lee "AF-MoP-42 Properties of VHF PEALD Silicon Nitride Film Deposited by Precursors with Different Amino Ligands"

    23 Jul 2023 - FROM 10:45 TO 11:15 UTC-07:00

  9. Martin McBriarty

    Materials Scientist

    "ALE1-WeM-8 Thermal ALE Reactants for Semiconductor Processing"

    25 Jul 2023 - FROM 2:45 TO 3:15 UTC-07:00

  11. Ravi Kanjolia

    Technology Fellow

    Co-Authors: Mansour Moinpour "AF2-TuM-16 Crystalline Gallium Nitride Deposition on SiO2/Si by RF-Biased Atomic Layer Annealing"

    25 Jul 2023 - FROM 4:45 TO 5:45 UTC-07:00

  13. Haripin Chandra

    Sr. R&D Manager

    "Emerging Materials Session: EM-WeM EUV Litho Materials"

    26 Jul 2023 - FROM 10:00 TO 10:30 UTC-07:00

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