International Conference on Atomic Layer Deposition (ALD/ALE) 2024

Join us to discuss the latest technology of atomic layer-controlled deposition of thin films and topics related to atomic layer etching.

Type of Event


Our Participation



Organized by the Association for Science and Technology of Materials, Interfaces & Processing (AVS), the conference is dedicated to the science and technology of atomic layer controlled deposition of thin films and topics related to atomic layer etching.  


  • AVS ALD Welcome Reception – Sponsored by Electronics business of Merck KGaA, Darmstadt, Germany
  • Sunday, August 4th from 18:00-20:00-Messukeskus Convention Centre, Hall 3
  • Join us for drinks and stimulating conversations. All conference delegates are welcome to attend. 


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Advance Your Knowledge With Our Leading Engineers

  1. Bhushan Zope

    Head of Thin Film Technologies

    Atomic Layer Etching Poster Session, Convention Centre, Hall 3. ALE-SuP-10 Selective Thermal Atomic Layer Etching of Molybdenum & Other Metals for Semiconductor Metallization

    04 Aug 2024 - 18:00 UTC+03:00

  2. Lukas Mai


    AF-LB-P: ALD Fundamentals Poster Session, Convention Centre, Hall 3. Indium precursors with improved thermal stability for atomic layer deposition of indium oxide

    04 Aug 2024 - 18:00 UTC+03:00

  3. Co-presenting

    with Colorado School of Mines

    Student Award Finalist Talk, Convention Centre, Hall 3. ALDALE-MoA-2 ALD Surface Functionalization of Poly-Si and SiO2 Nongrowth Surfaces with Small Inhibitor Molecules to Enable Area-Selective Atomic Layer Deposition of Al2O3

    05 Aug 2024 - 13:45 UTC+03:00

  4. Randall Higuchi

    Process Engineer

    Convention Centre, Hall D. AA1-TuM-1 Leakage Control of DRAM High-k Capacitor Stack by Ald Sc2O3, Y2O3 Inter-Layer

    06 Aug 2024 - 8:00 UTC+03:00

  5. Angelica Azcatl-Zacatzi

    Senior Scientist

    Convention Centre, Hall E. NS-TuA-3 Tuning MoCl5 Self-Etching Effect for Deposition of 2D MoS2 on 300mm Wafer by Thermal ALD

    06 Aug 2024 - 14:00 UTC+03:00

  6. Co-Presenting

    with the University of California San Diego

    Convention Center, Hall D. Co metal ALD on Cu with Cyclic clean by Peroxide and Hydrazine

    06 Aug 2024 - 17:45 UTC+03:00

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