FEOL gap-filling solution
AZ Spinfil® Series is a PHPS-based (Per Hydro Poly Silazane) inorganic spin-on dielectric material designed for gap-filling and planarization for FEOL (Front-End Of Line) applications in advanced device manufacturing.
Standard process flow for Spinfil®
Perfect Inorganic polymer
Convert to dense Silicon Oxide
Low CAPEX & high throughput
Inorganic SOD (PHPS)
- AZ Spinfil®: Best-in-Class inorganic SOD chemical designed for leading edge devices
- Spinfil® 400
- Spinfil® 600
- Spinfil® 800
Ancillaries for Inorganic SOD
- HC-100: Special rinse solvent designed for all Spinfil® product lines
- Thinner400: Well controlled DBE, use for dispense line purge for cleaning
- Rinse500: Well designed EBR solvent to enable good EBR shape (lower hump height)
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